12/30/2010	8:35:41 AM	Run aborted at 8:35 AM
12/30/2010	8:35:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/30/2010	8:35:44 AM	Recipe started at 8:35 AM
12/30/2010	8:35:44 AM	H2 valve closed
12/30/2010	8:35:44 AM	BCl3 valve closed
12/30/2010	8:35:44 AM	PH3 valve closed
12/30/2010	8:35:44 AM	SiCl4 pre valve closed
12/30/2010	8:35:44 AM	SiCl4 post valve closed
12/30/2010	8:35:44 AM	Main Vac valve closed
12/30/2010	8:35:44 AM	Bypass valve closed
12/30/2010	8:35:44 AM	Bubbler valve closed
12/30/2010	8:35:44 AM	Helium valve opened
12/30/2010	8:35:44 AM	Helium MFC set to  500.000000
12/30/2010	8:35:44 AM	H2 MFC set to  0.000000
12/30/2010	8:35:44 AM	BCl3 MFC set to  0.000000
12/30/2010	8:35:44 AM	PHl3 MFC set to  0.000000
12/30/2010	8:35:44 AM	SiCl4 MFC set to  0.000000
12/30/2010	8:35:44 AM	Bypass solenoid MFC set to  0.000000
12/30/2010	8:35:45 AM	Tube furnace set to 0
12/30/2010	8:36:02 AM	Helium valve closed
12/30/2010	8:36:02 AM	H2 valve closed
12/30/2010	8:36:02 AM	BCl3 valve closed
12/30/2010	8:36:02 AM	PH3 valve closed
12/30/2010	8:36:02 AM	SiCl4 pre valve closed
12/30/2010	8:36:02 AM	SiCl4 post valve closed
12/30/2010	8:36:02 AM	Main Vac valve closed
12/30/2010	8:36:02 AM	Bypass valve closed
12/30/2010	8:36:02 AM	Bubbler valve closed
12/30/2010	8:36:02 AM	Helium MFC set to  0.000000
12/30/2010	8:36:02 AM	H2 MFC set to  0.000000
12/30/2010	8:36:02 AM	BCl3 MFC set to  0.000000
12/30/2010	8:36:02 AM	PHl3 MFC set to  0.000000
12/30/2010	8:36:02 AM	SiCl4 MFC set to  0.000000
12/30/2010	8:36:02 AM	Bypass solenoid MFC set to  0.000000
12/30/2010	8:36:03 AM	Tube furnace set to 0
12/30/2010	8:36:03 AM	Run finished at 8:36 AM
12/30/2010	8:36:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/30/2010	8:41:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/30/2010	8:41:57 AM	Recipe started at 8:41 AM
12/30/2010	8:41:57 AM	Helium valve closed
12/30/2010	8:41:57 AM	H2 valve closed
12/30/2010	8:41:57 AM	BCl3 valve closed
12/30/2010	8:41:57 AM	PH3 valve closed
12/30/2010	8:41:57 AM	SiCl4 pre valve closed
12/30/2010	8:41:57 AM	SiCl4 post valve closed
12/30/2010	8:41:57 AM	Main Vac valve closed
12/30/2010	8:41:57 AM	Bubbler valve closed
12/30/2010	8:41:57 AM	Bypass valve opened
12/30/2010	8:41:57 AM	Helium MFC set to  0.000000
12/30/2010	8:41:57 AM	H2 MFC set to  0.000000
12/30/2010	8:41:57 AM	BCl3 MFC set to  0.000000
12/30/2010	8:41:57 AM	PHl3 MFC set to  0.000000
12/30/2010	8:41:57 AM	SiCl4 MFC set to  0.000000
12/30/2010	8:41:57 AM	Bypass solenoid MFC set to  0.000000
12/30/2010	8:41:58 AM	Tube furnace set to 0
12/30/2010	8:42:55 AM	Helium valve closed
12/30/2010	8:42:55 AM	H2 valve closed
12/30/2010	8:42:55 AM	BCl3 valve closed
12/30/2010	8:42:55 AM	PH3 valve closed
12/30/2010	8:42:55 AM	SiCl4 pre valve closed
12/30/2010	8:42:55 AM	SiCl4 post valve closed
12/30/2010	8:42:55 AM	Bubbler valve closed
12/30/2010	8:42:55 AM	Main Vac valve opened
12/30/2010	8:42:55 AM	Bypass valve opened
12/30/2010	8:42:55 AM	Helium MFC set to  0.000000
12/30/2010	8:42:55 AM	H2 MFC set to  0.000000
12/30/2010	8:42:55 AM	BCl3 MFC set to  0.000000
12/30/2010	8:42:55 AM	PHl3 MFC set to  0.000000
12/30/2010	8:42:55 AM	SiCl4 MFC set to  0.000000
12/30/2010	8:42:55 AM	Bypass solenoid MFC set to  0.000000
12/30/2010	8:42:55 AM	Tube furnace set to 0
12/30/2010	8:42:55 AM	Run finished at 8:42 AM
12/30/2010	8:42:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
